Microthermoforming of microfluidic substrates by soft lithography (?TSL): optimization using design of experiments

03.10.2011

Focke M, Kosse D, Al-Bamerni D, Lutz S, Müller C, Reinecke H, Zengerle R, von Stetten F

J. Micromech. Microeng. 21 (2011) 115002 (11pp)

We present a detailed analysis of microthermoforming by soft lithography for replication of foil-based microfluidic substrates. The process was systematically optimized by design of experiments toward the minimum deviation between mold and thermoformed foil substrates. Having identified and optimized the relevant parameters, we finally validated the process by the fabrication and testing of a microfluidic structure for blood plasma separation from human whole blood.

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Microthermoforming of microfluidic substrates by soft lithography (?TSL): optimization using design of experiments