Wafer level fabrication of single cell dispenser chips with integrated electrodes for particle detection

22.01.2015

Schoendube J, Yusof A, Kalkandjiev K, Zengerle R, Koltay P

J. Micromech. Microeng. 25 (2015) 025008 (10pp)

This work presents the microfabrication and experimental evaluation of a dispenser chip, designed for isolation and printing of single cells by combining impedance sensing and drop-on-demand dispensing. The dispenser chip features 50 × 55 ?m (width × height) microchannels, a droplet generator and microelectrodes for impedance measurements. Due to the novel fabrication technology involving the dry film resist, it became possible to fabricate facing electrodes at the top and bottom of the channel and to apply electrical impedance.

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Wafer level fabrication of single cell dispenser chips with integrated electrodes for particle detection